Seminet Inc., headquartereed in San Jose, CA, has been designing and building process control equipment for over 40 years. Starting with wet benches they later developed a full product family of precision air handlers, integrated tool enclosures, wafer handlers, reticle handlers and stockers and other fab automation tools.
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Seminet is a vertically integrated company that designs, builds, tests and services their own tools with installations all over the world. Seminet continues to develop new products to stay ahead of the demanding requirements of the semiconductor, biotech and aerospace industries.
Reticle Stocker
The Seminet Stocker is ultra-clean, fully automated reticle storage solution.
It provides industry leading storage of up to 13,500 bare reticles and the highest storage density of up to 45 reticles per square feet.
The third-generation modular design is configurable for 1,500, 3,900, 8,700 or 13,500 reticles.
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Also slim (track) versions are available.
Reticle Handler
The Seminet Reticle Handler is the fourth generation automated reticle handling, inspection, and cleaning tool for 6" reticles providing the following capabilities:
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Unique Automatic Inspect-and-Clean capability enables our tool to clean reticles without manual intervention
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Industry leading 1 micron inspection capability
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Automated reticle transfers between shipping boxes and stepper pods in a clean environment eliminates the risk of contamination from manual handling
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Automatic reticle orientation for stepper compatibility
Pod Buffer
The Seminet Pod Buffer delivers a space-efficient solution for Pod storage in an automated cleanroom environment with the following features:
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Stores 16-48 FOUP/SMIFs or Reticle SMIFs
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Stand alone or Integrated with any OEM tool
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Supports AGV, PGV and OHT Delivery
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GEM Messaging to Host or integrated with OEM tool
Pod Stocker
The Seminet Pod Stocker delivers a space-efficient solution for Pod storage in an automated cleanroom environment with the following features:
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Stores any pod, or shipping box.
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Available in various heights to use chase depth to store carriers as opposed to bay width
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Capacity can be 100”s to 1000”s depending on height available and pod size.
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Cleanroom environment inside stocker by using HEPA filters to provide laminar flow top to bottom and exhaust fans for areas with moving parts.
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Supports AGV, PGV and OHT Delivery
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Inventory tracking software with GEM comm to host for realtime updates and status.
Air Handler for Environmental Control
The Semifab Air Handlers offer precision environmental control for temperature, humidity and airflow:
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Integrated enclosures for OEMs (metrology, steppers, tracks, mask aligners, wafer bonders, etc.)
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Temperature +/-0.1°C, 24/7, 25yr typlife
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100-4000 CFM
