GigaMat Technologies is a US-based supplier of wafer processing equipment specializing in chemical-mechanical planarization (CMP), wafer polishing and related automation and metrology. Its portfolio includes batch and single-wafer CMP systems such as the 3806, 3808 and 3808-LMD, supporting wafer sizes up to 300 mm and a broad range of materials including silicon, SiC, sapphire, GaAs, quartz, germanium and lithium niobate.
GigaMat also provides wafer mounting and demounting, slurry delivery, wafer sorting and metrology, as well as integrated automated CMP solutions. Its equipment targets semiconductor, compound semiconductor, MEMS, photonics and other applications requiring high-precision polishing and planarization, with particular capabilities for SiC and other hard-material substrates.
CHEMICAL-MECHANICAL Planarization
Model 3806
150mm Silicon Polisher with Template Process
-
Up to 6" wafer polishing capabilities, including silicon, quartz, LiNi, Sapphire, Silicon carbide, Germanium ….
-
Lowest Cost of Ownership with high production throughput and low maintenance requirements
-
State-of-the-art touch screen recipe control PC
-
Three-way valve slurry recovery
-
Wax mount conversion kit
-
Network capabilities SECS/GEM
-
Turn key solution available
Model 3808
200mm Silicon Polisher with Template Process
-
Up to 8 " wafer polishing capabilities, including silicon, quartz, LiNi, Sapphire, Silicon carbide, Germanium….
-
Lowest Cost of Ownership with high production throughput and low maintenance requirements
-
State-of-the-art touch screen recipe control PC
-
Three-way valve slurry recovery
-
Wax mount conversion kit
-
Network capabilities SECS/GEM
-
Turn key solution available
Model 3808-LMD
300mm Silicon Polisher (patented)
-
Implementing head oscillation feature needed to polish one wafer per polishing carrier.
-
Achieve processing of one to four 300mm wafer per polishing run.
-
Oscillation movement originates with the drive box and travel distance is five (5) inches.
-
Up to 12" wafer polishing capabilities, including silicon, quartz, LiNi, Sapphire, Silicon carbide...
-
Implementing Head oscillation feature
-
Template or Wax mount
-
Turn key solution available
Single Wafer Polishing
GigaMat Technologies also offers any of its polisher models as single wafer per head variants as well. The single wafer per head polishing variants can polish any wafer size up to 300mm.
Model DM-18
Demounter
GigaMat Technologies Demount station is used to remove wafers safely from the GigaMat polisher carrier plate after polishing. The Demount station uses fresh DI water from the supply line to protect wafers from any damage and provides a safe means of transfer into cassettes. Benefits are
-
Increases yields by eliminating wafer scratches.
-
Prevents staining by storing the wafers under DI water immediately after demount.
-
Sensing of wafer coming into the cassette and carrier presence helps to save DI water usage.
Mounting Station
The Mounting Station was designed to mount semiconductor wafers onto semiconductor wafer carriers. The plate that is being pushed down onto the semiconductor wafer carrier is cushioned. To ensure safe operation, the machine is also equipped with a light curtain that will shut off power to the machine should the operator trip it.
