Hanyang ENG is a Korean engineering and equipment company with a strong focus on semiconductor and display fab infrastructure. Its Hi-Tech business provides ultra-high-purity (UHP) piping, mechanical equipment construction, cleanrooms, HVAC and utility infrastructure, supporting the installation and operation of semiconductor manufacturing facilities.
Hanyang ENG provides a broad portfolio of fab facility and automated process-support systems, including bulk gas and central chemical supply systems (CCSS), auto clean and quick coupler (ACQC), automated slurry filter exchange and slurry supply, waste discharge and cleaning, automated chemical sampling systems, automated drum handling (AMR), and chemical mixing/blending (CBU) systems.
Chemical Supply and automation
Modular CCSS System
Central Chemical Supply System
Customizable systems based on site requirements
-
Clean and safe automated transfer
-
Convenient and reliable chemical storage
-
Long-distance transfer
-
Precise and productive chemical mixing (chemical with DIW/chemical)
-
Direct supply to fab equipment (final supply point)
ACQC
Auto Clean and Quick Coupler
Single and multi ACQC version available for automated coupling of chemical transport to fab entry points:
-
Versatile robot for single or multiple zones with horizontal movement
-
Automatic placement of hose
-
Unmanned coupling to ensure safe operation of hazardous materials
-
Easy maintenance due to user-friendly design
AMR
Drum Transfer Coupling Automation
-
Automated transfer and coupling of drums to various equipment, such as CMP systems (slurry):
-
Unmanned material transport to ensure safe operation (minimized exposure risk) and eliminate heavy lifting
-
Automatic coupling/fastening with various customization options
-
Main focus on inorganic chemicals, such as sulfuric acid or hydrofluoric acid
Auto Sampling
Support frequent sampling in facility line:
-
Automated sampling of chemicals to control metal components in chemicals and analyze chemical composition
-
Small footprint (1.2x1.2m).
-
Prevent any chemical exposure
-
Quality reliability
Slurry Auto Filter Change
-
Automated solution to avoid chemical exposure during manual filter exchange
-
User-friendly design concept eliminates need to wear tychem with gas mask
-
4 modules of filter change unit
Waste Solvent Auto Cleaning
-
Avoid safety accidents by full automation
-
Error-proof design to prevent contamination with coupler
-
Waste discharge and cleaning (and drying) in one system
-
Quick coupler prevents residual waste fluid backflow after collection
-
Interlock prevents wrong connection of coupler
