Global ZEUS is a South Korean semiconductor equipment supplier specializing in wet-process, cleaning and thermal processing equipment, serving FEOL, BEOL and advanced packaging applications. Its portfolio includes ION12 and APOLLON single-wafer processors, VENUS high-temperature processors, BW batch wafer processors and ATOM film-framed wafer cleaners, covering cleaning, wet etch and strip processes for 200 mm, 300 mm and advanced packaging applications. ZEUS also supplies RTP systems such as the RHP200/150 series, alongside automation and robotics solutions.
Track
Coat & Develop
Global Zeus offers different standalone and inline track systems for 8'' and 12'' wafer processing:
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4-8 spin modules
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Compatible with different photoresist viscosities
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Optional wafer inspection and vision master to control process performance
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Inline: single and dual block (higher throughput)
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16-37 hot/cool modules
Rapid Thermal Processing (RTP)
Rapid Thermal Annealing and Oxidation
Single and batch 6''/8'' RTP systems for Si, SiC and GaN:
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SiC/GaN processing with horizontal lamps (XL version) and dual-side set-up for even heat distribution
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Si processing with vertical bulbs, mainly for RTA (post ion implant) and RTO
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Wafer rotation for enhanced process control
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150-200°C/sec ramp-up
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350-1200°C at +/-1°C accuracy
Photonic Debonding
Fast debonding for 12'' or ringframe
Fast, low-stress, precise, damage-free, and repeatable debonding using embedded PulseForge flash lamps:
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Increased throughput
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Carrier reusage for up to 15 cycles
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Fully automated configuration
