Hugle Electronics started its business in 1969 as far-east branch office of America Hugle Industries, which was a world leader of semiconductor manufacturing device at the dawn of the semiconductor industry. Taking advantage of this early start, Hugle has established its base as a unique manufacturer and continuously developed and offered a wide variety of original products well ahead of time in the areas of ever-changing semiconductor and flat panels such as LCD.
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The most important feature of Hugle is unrivaled and quick specialization in devices and equipment relating to pure clean and high quality production environment, greatly affecting product quality. As widely known, technical innovation of semiconductors is aiming at endless high integration, and the environment for their production and inspection inevitably require super pureness and cleanliness.
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Hugle's philosophy of "Clean & Quality" and their utmost efforts to pursue as precise technology as possible and helped realizing a more advanced production environment. Having obtained certificates of ISO9001 in March 1997, Hugle determined to further sophisticate its technology and quality to respond to customer trust
Carrier Cleaning Systems
SF-300
Automatic Cleaning for 300mm FOUP/FOSB
A model change from the renowned top class performance UPC-12500 (SORA) to the new SF-300 platform. It realizes space saving and significantly reduces the occupied floor space.
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Although compact, it also supports, high throughput and advanced cleaning and drying performance.
SF-200
Automatic Reticle POD (RSP-200 and EUV POD) Cleaning
Fully automated cleaning for RSP-200 and EUV PODs. Equipped with high cleaning performance, this small foot print device achieves nano-level particle removal.
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For EUV PODs, inner and outer PODs are cleaned/dried separately in dedicated cleaning chambers
SR-150
Automatic Cleaning of RSP-150 Reticle PODs
Fully automated cleaning on proven SR platform. Can handle all types of RSP-150 PODs and achieves high cleaning and drying performance with nano-level particle removal.
SC-8
Automatic Cassette and Box Cleaning
This equipment was developed as a successor to the CRD-4500 and is an automatic cleaning system that can handle up to 8" wafer carriers and boxes.
The object to be cleaned is set on a dedicated tray, and efficient cleaning/drying is performed in each processing chamber. Hugle's original special roller system, which has particle prevention measures, is used to transport wire trays.
ULTRASONIC DRY CLEANING
This is a non-contact dry cleaning system that uses ultrasonically vibrated air to remove and collect micron-sized foreign matter adhering to the workpiece surface. We provide optimal solutions by designing and manufacturing equipment specifications according to customer needs. It is used to clean:
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LCD/OLED
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Battery
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PCB
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Film/Web (R2R processing of functional films, metal foils, paper, magnetic tape, etc.)
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Edge cleaning
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Wafer
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VR & Smart Glass
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Substrate (single/double side, also compact models available)
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In the production line, foreign matter is removed without directly touching the base material, making it possible to clean it with high precision without damaging it. Our specialized technology for removing extremely small foreign matter makes it possible to maintain a clean manufacturing environment. Utilizing the specialized technology we have cultivated in the semiconductor and display industries, we provide products suited to precision equipment manufacturing sites.​​
