TECHNOLOGIES
Technology Portfolio
We offer innovative equipment for microelectronics manufacturing from lab to fab, both for semiconductor frontend and backend production as well as hybrid electronics.
Metrology & Inspection
Overlay & CD Control
Deposition & Patterning
Modification & Handling
Fab Infrastructure
Carrier Cleaning (Cassettes & PODs)
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Reticle Automation (Stockers & Buffers)
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Environmental Control (Air Handlers)
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Removal & Separation
Hybrid Electronics
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Electrohydrodynamic (EHD) Printing
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Semiconductor Market Coverage
We serve the major semiconductor market segments and offer cutting-edge equipment to meet the increasingly complex manufacturing requirements.
Logic & Memory
Overlay & CD Control, BF/DF Defect Inspection, Warpage
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ALD, PECVD/LPCVD/APCVD (oxides/nitrides)
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Plasma Etch, Wafer Thinning
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Vertical Furnaces (Diffusion, Annealing & Oxidation), Debond, Detape, Mount & Laminate​
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FOUP/POD Cleaning, Reticle Automation, Air Handlers, Trace Gas Analysis
MEMS & Sensors
Overlay & CD Control, Warpage, BF/DF Particle Inspection
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PECVD/APCVD/LPCVD (Sacrificial & Structural Layers), ALD (Conformal Coating)
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Plasma (Si DRIE) & Wet (Sacrificial Layer) Etch
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Vertical Furnaces (Oxidation, Annealing), Bond/Debond, Laminate​
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​FOUP/POD Cleaning, Reticle Automation, Air Handlers, Trace Gas Analysis
Power
Defect Inspection, Wafer Bow/Stress, CL, PL
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ALD for dielectrics, PECVD/LPCVD for passivation & oxides
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Grind, Saw & CMP, Plasma Etch for trench isolation​​​
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Vertical Furnaces (Dopant Annealing), Debond, Detape & Laminate
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FOUP/POD Cleaning, Reticle Automation, Air Handlers, Trace Gas Analysis
Advanced Packaging
BF/DF for Bump Defects, Warpage, 3D/TSV Etch Pattern Defects
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ALD and PECVD for Dielectric Layers
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Wafer Thinning, Plasma Etch (RDL vias, TSVs. cavities)
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Debond, Detape, Mount & Laminate
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FOUP/POD Cleaning, Reticle Automation, Air Handlers, Trace Gas Analysis
Compound Semi
PL/CL (dislocation density), Deflectometry, Overlay & CD Control, BF/DF for epi defects
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Plasma Etch, SiC Wafer Slicing
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Vertical Furnaces for Annealing & Diffusion (GaAs or GaN, e.g.), Debond, Detape, Mount & Laminate​
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FOUP/POD Cleaning, Reticle Automation, Air Handlers, Trace Gas Analysis
Optoelectronics
PL/CL (LED Epi Quality), BF/DF (Scratches & Cracks in LEDs)
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Plasma Etch, Multiwire Saw (Sapphire/GaN)
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Vertical Furnaces (Anneal for LED Stress Relief), Laminate (OLED Stack Formation)
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FOUP/POD Cleaning, Reticle Automation, Air Handlers, Trace Gas Analysis
