Inspectrology is your complete, reliable solution provider for quality Metrology and Wafer Inspection sales and services.

With decades of Metrology experience, the semiconductor professionals at Inspectrology provide full service support, metrology products, metrology standards, and educational training services to fabs worldwide.


Inspectrology carries a complete line of new and rebuilt IVS Metrology Systems. IVS Metrology systems have been providing reliable, robust measurements to fabs world wide for over 25 years.

Each rebuilt system is expertly refurbished by the engineers who designed them. IVS Metrology Systems feature unsurpassed wafer measurement capability on the toughest layers, CD & overlay measurements in the same recipe and a host of other features. Their engineers employ best practices to completely refurbish and recondition every IVS Metrology System we sell.

Inspectrology's Clear Wafer Aligner is an innovative imaging source used to facilitate the alignment of transparent wafers such as Silicon Carbide, Gallium Nitride and Saphire.

IVS 185

Inspectrology's IVS 185 is manufactured in our Sudbury, Massachusetts USA factory, just a few miles from where it was designed. The IVS 185 is the work horse of CD and Overlay metrology systems. The IVS 185 is the latest generation of the IVS line of CD and Overlay Metrology systems which started with the IVS 100, IVS 120, IVS 130, IVS 135, IVS 155, and IVS 165.

IVS-185 - 75-200 mm White Light Optical CD and Overlay Metrology for Semiconductor, LED and MEMS.

The cornerstone of the IVS-185′s unbeatable reliability and stability is its mean-time between failure (MTBF) of 1800 hours. The IVS-185 leads the industry, ensuring optimal system availability and years of problem-free operation. The robust design of the wafer handling and navigation system requires no operator assistance during recipe execution. Recipes and data remain stable over time.

Versatile wafer handling accommodates many variations in wafer composition including silicon carbide, quartz, glass, GaAs, GaN, and slotted wafers of various sizes. Square substrates are also supported.

Another unique characteristic of the IVS-185 is Multi-Z, which enables measurement of up to four planes in a consistent field of view inside a single measurement sequence. Multi-Z is capable of performing as many as 10 separate measurements at the same time, maximizing data collection and throughput.

Versatility of IVS-Systems

The IVS-185 delivers unparalleled measurement performance on all layers with CD and overlay measurements in the same recipe. Specific algorithms for MEMS applications allow for measurement of a wide array of MEMS structures. The proven capabilities of the IVS 185 to perform with high precision and rock solid reliability set this system apart.

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